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Canadian Light Source Collaboration Site > OMF
Optical Metrology Facility

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 Laboratory

 Welcome

 Who we are The Optical Metrology Facility Provides high quality mirror measurement and analysis for CLS beamline components, as well as to other departments and organisations.
 What we do The CLS optical metrology lab determines the quality of the optical components that are installed in the CLS beamlines. This requires measuring a variety of mirror parameters, to ensure compliance by the vendor to CLS specifications. Typical mirror parameters are "surface roughness", calibration of radius of curvature and figure "slope error". Figure, finish and mirror coating quality determines the photon flux/flux density, focus characteristics and photon energy range delivered to the beamline experimental station
 Our Lab All instruments pertaining to the CLS optical metrology lab are housed in a Class 10,000 clean room through four HEPA units. The instruments are mounted on vibration isolation tables with pneumatic isolation legs from TMC, in order to minimize vibrational effects. The temperature in the room is maintained at 23.0± 0.2 degrees Centigrade.

Capabilities

  • Class 10,000 Clean Room (23.0± 0.2 degrees Centigrade temperature stability).

All metrology instruments are mounted on vibration isolation tables to minimize the effects of vibration. Plastic curtains and bellows used where required to minimize air turbulence effects.

  • Micromap 570 3D surface profiler from Micromap Corporation.

Measures primarily surface roughness or surface finish of test optics.

  • Long Trace Profilometer (LTP) from Ocean Optics Inc.

Measures figure "slope error" and radius of curvature of test optics.

  • Verifire AT Fizeau Interferometer from Zygo Corporation.

Measures figure "slope error" and radius of curvature of test optics using radius bench measurement & distance measurement interferometer.

 
 

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 Links

  Component One Software for OOILTP
  Oak Ridge National Laboratory
  Brookhaven National Laboratory
  The Advance Light Source
  Optipedia
  Java Beamline Simulator
  Diffraction Limited Design
  Usask Electronic Journals
  Synchrotron Radiation News